Monday, March 9th, 2009
SVTC Technologies has been busy announcing new business directions ever since Joe Bronson stepped in as CEO at the beginning of this year. Last month it announced a partnership with Entrepix to provide 300 mm chemical mechanical polishing (CMP) development and production services for customers who use the Tool Access Program (TAP) at the SVTC […]
SVTC provides analytical services
Tags: AFM, analysis, EELS, FIB, IC, materials, MEMS, SEM, SIMS, TEM
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Thursday, February 26th, 2009
One year after this editor covered an SPIE panel on reference metrology and summarized the situation as “there is no more noise; there is only signal,” another lively panel at SPIE this evening discussed the need for not just precise but accurate critical dimension (CD) measurements in advanced IC lines. With smaller structures and reduced […]
IC reference metrology: small squirrelly signals
Tags: 2D, 32nm, AFM, bias, CD-SEM, IC, metrology
Posted in Equipment, fab, IC, Product | Comments Off on IC reference metrology: small squirrelly signals
Monday, February 2nd, 2009
Veeco has exited betas with a new Atomic Force Microscope (AFM) named Dimension® Icon™ that provides small-sample resolution for large-samples. Building upon the successful Dimension AFM platform, the latest member of the product line delivers the highest resolution, best ease-of-use, and fastest time-to-results of any large-sample AFM on the market today. “With the Icon AFM, […]
Veeco AFM exits beta with rave review
Tags: AFM, beta, IC, metrology, OEM, PV, R&D, tool
Posted in Equipment, FPD, IC, MEMS, Product, PV | Comments Off on Veeco AFM exits beta with rave review