Monday, April 5th, 2010
The 2010 SPIE Advanced Lithography conference is where we first get glimpses of the future of nano-scale patterning technology for manufacturing. Sometimes, many fuzzy blobs come into focus as a picture in a single moment, and Yan Borodovsky of Intel showed how to do 22nm node litho the day before SPIE officially started. At both […]
Litho limit seen as 1D patterns
Tags: 22nm, DSA, EbDW, EUV, HDD, HVM, litho, NGL, NIL
Posted in Equipment, fab, IC, Material, MEMS | Comments Off on Litho limit seen as 1D patterns
Monday, March 15th, 2010
Another back-to-the-future possibility for next-generation lithography (NGL) is direct write e-beam (DWEB), revitalized with multibeam clusters, curvilinear mask writing, and character projection (CP). The E-beam Initiative used the recent SPIE gathering to announce that it had added six new member companies, including GlobalFoundries and Samsung. Aki Fujimura, CEO of D2S and Managing Director of the […]
E-beam clusters, curves, and characters
Tags: 193nm, 22nm, 32nm, EbDW, EUV, HKMG, IC, litho, mask, NGL
Posted in Equipment, fab, IC, MEMS, Product, Service | Comments Off on E-beam clusters, curves, and characters
Monday, March 1st, 2010
Molecular Imprints, Inc, announced their first nanopatterning tool designed for pilot and volume production of patterned hard disc drive (HDD) substrates at the SPIE Advanced Lithography Symposium in San Jose, CA February 22. The NuTera HD7000 uses Jet and Flash Imprint Lithography (J-FIL) technology to print over 300 double sided disks per hour up to […]
Molecular Imprints HDD production tool and IC plans
Tags: 22nm, HDD, HVM, litho, NGL, NIL
Posted in Equipment, fab, IC, MEMS, Product | Comments Off on Molecular Imprints HDD production tool and IC plans