Monday, March 9th, 2009
SVTC Technologies has been busy announcing new business directions ever since Joe Bronson stepped in as CEO at the beginning of this year. Last month it announced a partnership with Entrepix to provide 300 mm chemical mechanical polishing (CMP) development and production services for customers who use the Tool Access Program (TAP) at the SVTC […]
SVTC provides analytical services
Tags: AFM, analysis, EELS, FIB, IC, materials, MEMS, SEM, SIMS, TEM
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Monday, March 2nd, 2009
Partners SII NanoTechnology and Carl Zeiss NTS have joined with ASML R&D and Toshiba’s process and manufacturing engineering groups to show a new way to create accurate cross-sections of soft photoresist and low-k dielectric lines in dense circuit patterns. First shown in a poster paper at SPIE last week was the ability to generate accurate […]
ArBID allows nanoscale cross-sections
Tags: 32nm, 45nm, APC, Ar, calibration, FIB, linewidth, metrology, SEM, TEM
Posted in Equipment, fab, IC, Product | Comments Off on ArBID allows nanoscale cross-sections